Influence of Vapor Phase Epitaxy on Large-scale Electrically-active Defect Accumulations in Semiinsulating GaAs Substrates

V. A. Yuryev; V. P. Kalinushkin; A. V. Zayats; Y. A. Repeyev; V. A. Fedoseyev

Influence of Vapor Phase Epitaxy on Large-scale Electrically-active Defect Accumulations in Semiinsulating GaAs Substrates

V. A. Yuryev, V. P. Kalinushkin, A. V. Zayats, Y. A. Repeyev, V. A. Fedoseyev

Research output: Contribution to book/anthology/report/conference proceeding › Book chapter › Research

Original language	English
Title of host publication	Extended Abstracts of the V International Conference on Defect Recognizing and Image Processing in Semiconductors and Devices, Vallaloid (Spain), August 21-24, 1993
Publication date	1993
Publication status	Published - 1993

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Yuryev, V. A., Kalinushkin, V. P., Zayats, A. V., Repeyev, Y. A., & Fedoseyev, V. A. (1993). Influence of Vapor Phase Epitaxy on Large-scale Electrically-active Defect Accumulations in Semiinsulating GaAs Substrates. In Extended Abstracts of the V International Conference on Defect Recognizing and Image Processing in Semiconductors and Devices, Vallaloid (Spain), August 21-24, 1993

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title = "Influence of Vapor Phase Epitaxy on Large-scale Electrically-active Defect Accumulations in Semiinsulating GaAs Substrates",

author = "Yuryev, {V. A.} and Kalinushkin, {V. P.} and Zayats, {A. V.} and Repeyev, {Y. A.} and Fedoseyev, {V. A.}",

year = "1993",

language = "English",

booktitle = "Extended Abstracts of the V International Conference on Defect Recognizing and Image Processing in Semiconductors and Devices, Vallaloid (Spain), August 21-24, 1993",

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Influence of Vapor Phase Epitaxy on Large-scale Electrically-active Defect Accumulations in Semiinsulating GaAs Substrates. / Yuryev, V. A.; Kalinushkin, V. P.; Zayats, A. V. et al.
Extended Abstracts of the V International Conference on Defect Recognizing and Image Processing in Semiconductors and Devices, Vallaloid (Spain), August 21-24, 1993. 1993.

Research output: Contribution to book/anthology/report/conference proceeding › Book chapter › Research

TY - CHAP

T1 - Influence of Vapor Phase Epitaxy on Large-scale Electrically-active Defect Accumulations in Semiinsulating GaAs Substrates

AU - Yuryev, V. A.

AU - Kalinushkin, V. P.

AU - Zayats, A. V.

AU - Repeyev, Y. A.

AU - Fedoseyev, V. A.

PY - 1993

Y1 - 1993

M3 - Book chapter

BT - Extended Abstracts of the V International Conference on Defect Recognizing and Image Processing in Semiconductors and Devices, Vallaloid (Spain), August 21-24, 1993

ER -