A 32-site neural recording probe fabricated by DRIE of SOI substrates

P. Norlin, M. Kindlundh, A. Mouroux, Kenichi Yoshida, U.G. Hofmann

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Originalsprog	Engelsk
Tidsskrift	Journal of Micromechanics and Microengineering
Vol/bind	12
Udgave nummer	4
Sider (fra-til)	414-419
ISSN	0960-1317
Status	Udgivet - 2002

AUB Link

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title = "A 32-site neural recording probe fabricated by DRIE of SOI substrates",

author = "P. Norlin and M. Kindlundh and A. Mouroux and Kenichi Yoshida and U.G. Hofmann",

year = "2002",

language = "English",

volume = "12",

pages = "414--419",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

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TY - JOUR

T1 - A 32-site neural recording probe fabricated by DRIE of SOI substrates

AU - Norlin, P.

AU - Kindlundh, M.

AU - Mouroux, A.

AU - Yoshida, Kenichi

AU - Hofmann, U.G.

PY - 2002

Y1 - 2002

M3 - Journal article

SN - 0960-1317

VL - 12

SP - 414

EP - 419

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 4

ER -